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As demands for inspection precision grow in semiconductor manufacturing, optical coatings, and ultra-precision machining, global clients increasingly depend on stable, multi-wavelength deep UV wavefront measurement solutions. Phasics recently completed the successful delivery of several customized Kaleo Kit modular system to a key European client, supporting their breakthroughs in advanced process development.

The Kaleo Kit systems delivered were specifically designed to meet the client’s demanding on multi-wavelength UV compatibility, supporting custom narrow-linewidth 266 nm UV laser sources, along with standard modules at 265 nm, 365 nm, and 455 nm. This flexibility overcomes the limitations of single-wavelength detection in high-precision UV metrology and offers greater adaptability across applications.

To ensure optimal system integration and performance, Phasics’ engineering team provided on-site support including installation, multi-wavelength calibration, and operational training. Our client expressed strong satisfaction with the final acceptance of the system.

Kaleo Kit: The Modular Metrology System for Precision Optics

Kaleo Kit from Phasics is a modular optical measurement system. It is built from multiple interchangeable and compatible modules, allowing users to create a cost-effective, compact, and user-friendly optical testing setup. The platform is designed to accommodate various measurement scenarios, supporting optical quality assessments from R&D through production stages.

The accompanying Phasestudio software enables a single measurement to provide wavefront error (WFE), optical aberrations (Zernike coefficients), point spread function (PSF), and modulation transfer function (MTF). The Kaleo Kit covers multiple wavelength ranges from deep ultraviolet to far infrared, offering high resolution, broad dynamic range, and high sensitivity. The system is compact, easy to use, and quick to set up.

With just three steps, users can configure their ideal setup:

This recently delivered Kaleo Kit platform highlights three core strengths that reinforce Phasics’ leadership in wavefront measurements in the deep UV spectrum:

• High precision and repeatable RMS measurements in deep UV wavelengths.
• Multi-wavelength adaptability, providing excellent cost-performance balance.
• Industry-grade reliability for continuous operation in complex production environments.

Phasics is committed to expanding the Kaleo Kit’s wavelength range and technical capabilities, providing versatile measurement solutions to meet the evolving needs of industries worldwide. We warmly invite our global partners to join us in shaping the future of precision manufacturing.For more information, please contact here.