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Phasics is innovating in optical metrology with a new instrument able to measure both transmitted and reflected wavefront error (TWE/RWE). Coated and uncoated optics can be qualified over a diameter of 5.1 inches (130 mm) at their working wavelengths. The Kaleo MultiWAVE is an advantageous alternative and cost-effective solution to the purchase of several interferometers. The system offers a measurement accuracy comparable to Fizeau interferometry.
Configuration | Double pass |
Measurement capability | RWE of reflective surfaces TWE of transparent optics |
Number of wavelengths per instrument | 1 or 2 (standard), up to 8 (custom) |
Custom Wavelengths | Any wavelength from 193 nm to 14 μm including: UV: 266, 355, 405 nm VIS / NIR: 550, 625, 780, 940, 1050 nm SWIR / MWIR / LWIR: 1.55, 2.0, 3.39, 10.6 µm |
Clear Aperture | 5.1" (130 mm) |
Beam height | 108 mm |
Alignment system | Live phase & Zernike coefficients display |
Polarization | Compatible with depolarizing optics |
Alignment FOV | +/- 2° |
Pupil focus range | +/- 2.5 m |
Dimensions / Weight | 910 x 600 x 260 mm³, 25 kg |
Vibration isolation | Not necessary |
RMS repeatability (2) | < 0.7 nm (< λ / 900) |
Sample reflectivity range | ~4% - 100% |
¹ On a 4″ pupil size, with a 625 nm source
² 36 sequential measurements are performed on a 4” reference mirror, each being averaged 16 times. A reference is defined as the average of all odd numbered measurements. RMS repeatability is then defined as the average RMS difference plus 2 times the standard deviation of the difference between even numbered measurements and the reference.