The surface under test is imaged onto the SID4 quantitative phase imaging camera. The SID4 can be directly integrated on a commercial reflective microscope or on a dedicated in-line optical system. As the Phasics SID4 relies on QWLSI, an achromatic wavefront measurement technology, white light and LED sources are well-suited. Moreover, the measurement can be performed with any microscope objectives and is not polarization dependent.
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